P03Q Series

P03Q Series

P03Q series plasma processing system allows efficient vacuum plasma processing of different types of electronic parts and components. With configurable electrode combination, the system can perform single-layer treatment or treatment using combined magazine-electrodes for mass production.

Features：

• 13.56 MHz RF power supply with automatic network matcher

• Electrode tray removable to adapt to products of different shapes

• Replaceable electrodes,including replaceable magazines

• Extremely small footprint

• Stainless steel shell and chamber for dust-free requirements.

Applications:

• Removing organic pollutants

• Removing fluorine and other halogen pollution

• Removing metals and metal oxides

• Improving adhesive force of spin coated film

• Cleaning metal bonding pads

• Cleaning up contamination before wafer bumping