P03Q series plasma processing system allows efficient vacuum plasma processing of different types of electronic parts and components. With configurable electrode combination, the system can perform single-layer treatment or treatment using combined magazine-electrodes for mass production.
13.56 MHz RF power supply with automatic network matcher
Electrode tray removable to adapt to products of different shapes
Replaceable electrodes,including replaceable magazines
Extremely small footprint
Stainless steel shell and chamber for dust-free requirements.
Removing organic pollutants
Removing fluorine and other halogen pollution
Removing metals and metal oxides
Improving adhesive force of spin coated film
Cleaning metal bonding pads
Cleaning up contamination before wafer bumping