Roll-to-roll microwave plasma treatment system
Microwave plasmas have significant advantages over radio-frequency plasmas in handling electrostatic sensitive components. As the electric field of microwave plasma oscillates at higher frequencies, the electrons travel a shorter distance before changing direction compared with those in RF plasma. This means fewer electrons can reach the surface of the component during each cycle of motion,thus minimizing the effect of surface charges. Due to the lowest surface charge, ions will not be accelerated to the surface, and thus undesired surface collisions is avoided.
The processing rate of the microwave roll-to-roll plasma processing system is twice that of the traditional plasma equipment, with a processing uniformity higher than 90%.
